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Micro-structuring of gold coated plates with LIPSS for localized plasmonic sensors

Wednesday (24.06.2020)
14:10 - 14:30 Room 2
Part of:

Localized surface plasmon resonance (LSPR) or particle plasmon resonance (PPR) consists in a specific arrangement of metallic nanostructures in order to enhance their plasmonic response. This technique can lead to the development of high sensitivity bio-sensors but faces various difficulties on the fabrication side.

Different methods have been explored in literature like UV lithography, interferometry, nanosphere lithography, nanoimprint… Main issues come from repeatability of the process and large-scale applicability. In our case we investigate Laser Induced Periodic Surface Structuring (LIPSS) in order to produce sub micron periodic patterns on gold for localized plasmonic sensors fabrication.

LIPSS are periodic structures that are generally created on a material surface by accumulation of ultra-short pulses exhibiting energies close to the material ablation threshold. High resolution structures proportional to the laser operating wavelength, typically hundreds of nanometers, are generated.

Although LIPSS physical mechanisms are still under investigation, they have been induced in a wide variety of materials (metals, semiconductors, polymers, etc) for numerous applications such as realization of hydrophobic/hydrophilic surfaces, control of surface reflection or realization of low friction / high adhesion surfaces. Here we used ultrashort pulses (500 fs) at 515 nm to induce LIPSS structures on thin gold layers for LSPR sensors.

The samples were made of a thin layer of gold (35 nm) deposited on glass, with an intermediate bounding layer of Chromium. The LIPSS process permitted to generate regular patterns with a periodicity of about 500 nm. Due to the thin layer of gold, a careful control of the laser energy deposited on the material is needed

Additional Authors:
  • Dr. Yves Hernandez
    MULTITEL asbl
  • Marc Lamblin
    MULTITEL asbl
  • Dr. Fabian Dortu
    MULTITEL asbl
  • Dr. Damien Bernier
    MULTITEL asbl


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