UV laser micro processing of doped glassWednesday (24.06.2020) 16:10 - 16:30 Room 3
Doping by ion exchange enhances the functionality of glass. It is used for changing the local refractive index in order to create waveguides or gradient index (GRIN) glass. Furthermore, doping with metal ions can be utilized as a basis for the formation of metallic nanoparticles with plasmonic properties inside the glass. Two methods of micro processing of metal ion doped glass are presented:
1. Ag+ doped glass is shaped by laser ablation in order to create a surface profile for a specific optical functionality. An F2 laser emitting at 157 nm is suitable to ablate material without substantial modification of the remaining glass. In this way, hybrid optical elements combining gradient index with a refractive or diffractive surface profile are fabricated. An example is a Fresnel-lens on top of a GRIN lens resulting in a corrected micro imaging objective.
2. UV laser irradiation of Ag+ doped glass at a wavelength of 193 nm (ArF excimer laser) leads to the formation of Ag nanoparticles inside the glass. Reduction of Ag+ to Ag and diffusion in the laser heated matrix results in small particles (1-3 nm) and agglomerations thereof (5-15 nm). Plasmon absorption around 435 nm is measured. By spatially defined laser irradiation, the Ag particles are formed only in specific regions of the sample. Micrometer resolution of these modifications is demonstrated. As an example a linear grating with a period of 2.5 µm composed of particle-rich lines and particle-deficient spaces is shown.
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