Please note that the program is published in Central European Summer Time (CEST).

Back to overview


The LaserFIB – uniting high-resolution microscopy and massive material ablation

Tuesday (23.06.2020)
15:00 - 15:20 Room 1
Part of:

Modern materials research in combination with innovative fabrication and processing techniques enable development of increasingly complex materials and advanced components. Analyzing these new materials and understanding their microstructure requires sophisticated characterization tools. Focussed ion beam scanning electron microscopes (FIB-SEMs) are well established for sample analysis and preparation at the nano- to micro-scale in 2D, 3D or even 4D. However, when it came to sample modification and analysis at even larger scales up to millimeters FIB-SEMs were facing a challenge.


With the LaserFIB we present and introduce a new system to solve this challenge and bridge this gap. The LaserFIB features a fs laser that has been integrated with a ZEISS Crossbeam. This combination enables high-resolution SEM imaging and FIB patterning as well as site-specific, large-scale sample structuring and preparation using the laser. All laser processing is done in a separate chamber extending the airlock to avoid damage and contamination of the components in the instrument’s main chamber (Fig. 1). The massive material ablation by the laser is highly efficient in large volume bulk material removal and offers a way to gain access to deeply buried regions of interest (ROIs). Large cross-sections can be prepared in seconds and subsequently get analyzed by SEM leveraging all sorts of analytical techniques (e.g. EDS or EBSD). If needed the FIB allows to fine-polish the cross-section face for undisturbed imaging, however, it has been shown that details of the microstructure are already visible after laser polishing only.


In this contribution we will introduce the new LaserFIB and explain the site-specific workflow in detail. Application examples covering different sample materials and applications will be shown.

Tobias Volkenandt
Carl Zeiss Microscopy GmbH
Additional Authors:
  • Fabián Pérez-Willard
    Carl Zeiss Microscopy GmbH
  • Benjamin Tordoff
    Carl Zeiss Microscopy GmbH


Category Short file description File description File Size
Extended Abstract This is the extended abstract including the picture 57 KB Download