Cu-based microfabrication using green femtosecond laser reductive sintering of Cu2O nanospheresTuesday (23.06.2020) 11:30 - 11:50 Room 2
We demonstrated the fabrication of microstructures using multiphoton absorption-induced thermochemical reductive sintering of Cu2O nanospheres. Finer patterns were formed using green femtosecond laser pulses. Cu2O nanosphere solution was spin-coated on glass substrates. The laser pulses with the wavelength of 515 nm were focused and scanned into the Cu2O nanosphere solution films using an objective lens with a numerical aperture of 0.90 to form microstructures. After that, nonirradiated Cu2O nanospheres were removed. The microstructures written inside the Cu2O nanosphere solution film appeared after removing Cu2O nanospheres. These results indicate that the microstructures were formed inside the solution films using multiphoton absorption-induced thermochemical reduction. This direct writing technique is useful for creating three-dimensional microstructures in microelectro mechanical systems.
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