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Application of a femtosecond laser in large area microstructure preparation for FIB/SEM analysis

Wednesday (24.06.2020)
18:20 - 18:40 Room 3
Part of:

Focused Ion Beam (FIB) cross section preparation has proven to be an excellent method to investigate microstructures when the desired material or feature is sensitive to stress or deformation as induced by mechanical preparation methods. A strong disadvantage however is, that FIB cross sections usually measure only several tens of micrometers in width and depth. Whenever a larger investigation area is required, FIB becomes a very time-consuming and expensive preparation method.

Therefore, pulsed nanosecond laser systems where implemented onto FIB/SEM systems to take over the rough milling steps but have shown to cause large heat affected zones as well as rough cross section surfaces and thus require extensive FIB post-polishing.

To overcome this issue, a femtosecond laser system was implemented with the aim to reduce heat affected zones and improve cross section quality.

The talk will present the parameter development of a 3-step polishing routine used for different metals and alloys, Lithium-Ion battery foils and microelectronic components and will also outline the excellent polishing quality achievable with femtosecond laser ablation which in some cases needs no further FIB polishing to reveal the real microstructure.

Julian Schurr
Aalen University of Applied Sciences - Technology and Economics
Additional Authors:
  • Tim Schubert
    Hochschule Aalen - Technik und Wirtschaft
  • Dr. Stephan Hiller
    Carl Zeiss Microscopy GmbH
  • Tobias Volkenandt
    Carl Zeiss Microscopy GmbH
  • Dr. Timo Bernthaler
    Hochschule Aalen - Technik und Wirtschaft
  • Prof. Dr. Gerhard Schneider
    Hochschule Aalen - Technik und Wirtschaft


Category Short file description File description File Size
Extended Abstract LPM2020-extended-abstract-L-06-195-Schurr Extended abstract 193 KB Download