Multi-Scale Laser Processing of Thin Oxide FilmsWednesday (24.06.2020) 17:40 - 18:00 Room 2
Multiscale patterning can improve the functional properties of oxide thin films. Micro- and nano-scale features were achieved through the use of direct laser interference patterning (DLIP) and picosecond generated laser induced periodic surface structures (LIPSS). The resulting hierarchical patterned indium tin oxide and vanadium oxide thin films exhibited features ranging from 75 nm up to 50 µm. The anisotropic properties of the patterned films are characterized via polarized infrared spectroscopy and anisotropic electrical conductance measurements.