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Lecture

Optical measurement of functional surface structures measured with super resolution

Friday (26.06.2020)
10:10 - 10:30 Room 3
Part of:


AFM and SEM have a much higher lateral resolution than 3d microscopes but both technologies have limits to measure high inclined small surface structures spacial. While the cantilever needle of AFM’s cannot reach between the structures and could easy be damaged the 3d reconstructions of SEM images can hardly being used for metrology.

Optical 3d microscopes provide a much easier handling and higher speed at reasonable costs. Out of the available technologies the white-light interferometry provides a much higher z-resolution than confocal microscopy or focus variation on subatomic level but traditionally lacks the ability to measure high inclined surfaces.

Optimized hardware components combined with advanced algorithm running on powerfully GPGPU’s (general purpose graphic processing units) can break traditional limits and scan high inclined silicon structures with feature seizes down to app. 0.1 – 0.4 µm. Super resolution can increase the number of measuring points per single scan from 5 MP to app. 50 MP with measuring point distances down to app. 0.01 µm. Speed, performance and simple handlings enables the user to use such sensors for shop floor quality control and automated measuring processes.

The presentation shows the results of the improvements based on practical measurements comparisons to SEM and microscopic images as well as resolution targets according ISO 25174-604-2.2.15-17 and gives an outlook to further technology improvements which are expected in the near future.

Speaker:
Matthias Liedmann
Gesellschaft für Bild- und Signalverarbeitung (GBS) mbH
Additional Authors:
  • Torsten Machleidt
    Gesellschaft für Bild- und Signalverarbeitung (GBS) mbH
  • Max Schneider
    Gesellschaft für Bild- und Signalverarbeitung (GBS) mbH

Dateien

Category Short file description File description File Size
Extended Abstract LPM2020-extended-abstract-L-02-233-Liedmann AFM and SEM have a much higher lateral resolution than 3d microscopes but both technologies have limits to measure high inclined small surface structures spacial. While the cantilever needle of AFM’s cannot reach between the structures and could easy be damaged the 3d reconstructions of SEM images can hardly being used for metrology. 173 KB Download