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Plenary Lecture

Advanced femtosecond laser 3D micro/nanoprocessing

Tuesday (23.06.2020)
09:20 - 10:00 Room 1

09:20 - 10:00

The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce multiphoton absorption with materials that are transparent to the laser wavelength. More importantly, focusing the fs laser beam inside the transparent materials confines the multiphoton absorption only within the focal volume, enabling three-dimensional (3D) micro- and nanofabrication. Flexible micro/nanoprocessing with respect to structure, function, and scale is then possible by femtosecond lasers with accurate control on all 3D environments for both inorganic and organic materials. Combination of different schemes of the 3D processing, so called, hybrid femtosecond laser 3D processing, can further enhance the performance to diversify geometries of the fabricated 3D micro/nanostrucstures with enhanced functionalities. In this talk, our recent activities on advanced femtosecond laser 3D micro/nanoprocessing including fabrication of biochips for mechanism study of cancer cell metastasis and invasion, fabrication of 3D microfluidic surface-enhanced Raman spectroscopy (SERS) sensors for ultratrace analysis, and 3D printing of pure protein microstructures are introduced.