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Periodic microstructuring of metal moulds using direct laser interference patterning for nanoimprint replication

Wednesday (24.06.2020)
13:10 - 13:13 Room 1
Part of:
- Poster Periodic microstructuring of metal moulds using direct laser interference patterning for nanoimprint replication 1 Dr. Marcos Soldera
- Poster Comparison of structural colors achieved by laser induced periodic surface structures and direct laser interference patterning 1 Dr. Marcos Soldera
- Poster *student* Wetting properties of the aluminium surface structures fabricated using Direct Laser Interference Patterning with picosecond and femtosecond pulses 1 Dipl.-Ing. Stephan Milles
- Poster The numerical realization of a model of interaction of ultrashort laser pulses with solid 1 Prof. Vladimir Zhukov
- Poster On the problem of the initial conditions for tightly-focused ultrashort laser pulses in the modeling of laser beam propagation in transparent solids 1 Prof. Vladimir Zhukov
- Poster Innovative polymer coating systems – applied by laser sintering technique 1 Dr. Anna Buling
- Poster Tangential laser turning of fused silica usin ultra-short laser pulses 1 Julian Zettl
- Poster Process optimization of Direct Laser Interference Patterning 1 Dr. Bogdan Voisiat
- Poster Dynamic aberration correction via spatial light modulator (SLM) for femtosecond direct laser writing 1 Gabrielius Kontenis
- Poster Modification of metal nanoparticles via femtosecond laser pulses and their application for SERS 1 Dr. Asta Tamuleviciene
- Poster Ultraviolet and Infrared Femtosecond Laser Irradiation of Thermoplastics PET and PA66 1 Dr. Xxx Sedao
- Poster High pulse energy femtosecond laser machining station for the interference and parallel processing 1 Dr. Simonas Indrisiunas
- Poster Laser material processing with a multi-beam setup based on Excited State Absorption 1 Sebastian Engel
- Poster GO-neutral red nanocomposite reduction by pulsed laser irradiation 1 Dr. Romualdas Trusovas
- Poster *student* Numerical simulation of energy relaxation in Mo thin films exposed to femtosecond laser pulse 1 Kryštof Hlinomaz
- Poster Modification of medical-grade poly(L-lactide) using femtosecond laser filamentation 1 Dr. Bogusz Stepak
Session Chair

Session PS: Poster Session 02
Belongs to:
Topic PS: Poster Session

Periodic structure in surfaces with feature sizes in micro- and nanoscale range are capable of modifying a wide range of surface properties, such as wetting, friction, anti-bacterial behavior and optical reflectivity. Among the vast developed technologies to fabricate periodic patterns, Nanoimprinting Lithography (NIL) is regarded as one of the most promising industrial-scalable processes for the parallel replication of structures at the micro- and nano-scale with high-precision and high-quality. However, the fabrication of large-area microstructured molds at low-cost and high processing speed is still challenging. A manufacturing method that fulfills these requirements is Direct Laser Interference Patterning (DLIP), since it is a one-step process that can be used to pattern periodic micro- and submicro-structures in metals, ceramics and polymers with processing speeds up to 1 m2/min. In this work, microstructures were fabricated employing four-beam DLIP on three different metals, namely Ni, Cr, and Cu, relevant for the mold production in NIL systems. A picosecond laser source emitting at a wavelength of 532 nm was used to structure periodic hole-like patterns with a spatial period of 5 µm. The results show that the quality and surface topography of the produced hole-like micropatterns are determined by the laser processing parameters, such as irradiated energy density and number of pulses. After laser manufacturing, the three studied metals were used as embossing molds to imprint micropatterns on polymethyl methacrylate (PMMA) foils using an electrohydraulic press. Topographical profiles demonstrate that the imprinted microstructures are comparable to the molds showing a satisfactory replication of the textures. The polymeric microlens arrays that showed the best surface homogeneity and overall quality were those embossed with the Cr molds. In contrast, the PMMA substrates embossed with the Ni and Cu stamps showed a low quality and a relatively small microlens diameter caused by the rough cavities sidewalls of these stamps.

Additional Authors:
  • Dr. Yangxi Fu
    Technische Universität Dresden
  • Wei Wang
    Technische Universität Dresden
  • Dr. Bogdan Voisiat
    Technische Universität Dresden
  • Prof. Dr. Andrés Fabián Lasagni
    Technische Universität Dresden


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