3D microfabrication of thermoset polymer PDMS using laser-induced bubbleWednesday (24.06.2020) 11:23 - 11:26 Room 1
Polydimethylsiloxane (PDMS) is a versatile material that has been widely used in the fields of biology and tissue engineering. This polymer has numerous useful characteristics including a high degree of transparency, resistance to various chemicals and minimal cost. For these reasons, PDMS has been employed in the construction of microfluidic devices since Whitesides et al. first used PDMS as a microfluidic chip material in 1998. A soft-lithography technique originally developed by the semiconductor industry has been used to pattern the surfaces of substrates in order to fabricate complex microfluidic devices made of PDMS. However, this process involves multiple steps and requires access to advanced clean room facilities, which are typically costly. On the other hand, the direct laser writing of PDMS using conventional nanosecond lasers via single-photon absorption is an attractive alternative method that allows rapid prototyping. However, the majority of conventional laser processing techniques allow only low fabrication rates (typically less than a few μm/pulse) due to the use of solid transparent polymers as substrates.
In the meanwhile, we have developed the surface microfabrication technique of PDMS using laser-induced bubbles generated by the conventional ns laser, referred to as microFLIB (microFabrication using Laser-Induced Bubble). In the previous study, we demonstrated the high-quality and high-speed microfluidic fabrication of the PDMS using the microFLIB and additionally, conducted the selective metal plating only on the fabricated areas, whereas the technique was limited to the surface micromachining. Therefore, in this presentation, we attempted the 3D microfabrication of the PDMS using the microFLIB.
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